Design and Research of a Microfocus X-Ray Tube

Authors

• Haodong Zhao, School of Integrated Circuits, Nanjing University of Information Science and Technology, Nanjing 210000, China
• Shizong Wei, School of Electronics and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210000, China
• Daolong Yu, School of Electronics and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210000, China
• Zhixia Liu, School of Electronics and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210000, China
• Yuezhong Chen, School of Electronics and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210000, China
• Ji Xu, School of Integrated Circuits, Nanjing University of Information Science and Technology, Nanjing 210000, China

Abstract

Abstract: With the rapid advancement of high-resolution imaging and Micro-nano detection technology, microfocus X-ray sources show great potential for applications in industrial non-destructive testing, biomedical imaging, and material microstructure analysis. Achieving a focal spot size below 10 μm is essential for enhancing spatial resolution. However, traditional X-ray tubes are constrained by heat source dimensions, electron beam divergence, and limited focusing capabilities, which makes it challenging to simultaneously achieve focal spot miniaturization and adequate radiation intensity. In this study, a hot cathode electron gun is modeled using CST particle studio. Simulations are conducted to analyze the influence of the first anode on electrons emitted from the cathode. A control structure with a focusing electrode is implemented to pre-focus the emitted electrons, aiming to achieve an appropriate electron beam shape and stable emission current. The effects of the focusing electrode, gate voltage, and anode voltage on the focal spot size and tube current are systematically analyzed. Ultimately, a micro-focus X-ray tube with a focal spot size of approximately 5 μm is achieved in the final design.

Recommended Citation

Zhao, Haodong; Wei, Shizong; Yu, Daolong; Liu, Zhixia; Chen, Yuezhong; and Xu, Ji (2026) "Design and Research of a Microfocus X-Ray Tube," Journal of System Simulation: Vol. 38: Iss. 9, Article 11.
DOI: 10.16182/j.issn1004731x.joss.25-1028
Available at: https://dc-china-simulation.researchcommons.org/journal/vol38/iss9/11

First Page

2607

Last Page

2615

CLC

TN24; TP391.9

Recommended Citation

Zhao Haodong, Wei Shizong, Yu Daolong, et al. Design and Research of a Microfocus X-Ray Tube[J]. Journal of System Simulation, 2026, 38(9): 2607-2615.

Corresponding Author

Xu Ji

DOI

10.16182/j.issn1004731x.joss.25-1028