Research on Scheduling Problem of Single-arm Cluster Tools with Residency Time Constraints

Authors

Lu Rui, 1. Liaoning Police College Academy, Dalian 116036, China;;
Linying Li, 2. School of Software, Dalian University of Foreign Languages, Dalian 116044, China;

Abstract

Abstract: Considering the scheduling model and schedulibility for single-arm cluster tools with wafer residency time constraints, a mixed- integer linear programming model with both single-arm and temporal constraints for processing module was constructed. The rationality of equivalent processing time for concurrency module was theoretically proved. Based on this, the periodic wafer processing and transportation procedure for both single-arm and processing module was analyzed. Meanwhile, the schedulibility conditions for cluster tools were proved. The simulation experiments were carried out to test the model and schedulable conditions, and the results reveal the validity and feasibility of the presented model.

Recommended Citation

Rui, Lu and Li, Linying (2020) "Research on Scheduling Problem of Single-arm Cluster Tools with Residency Time Constraints," Journal of System Simulation: Vol. 28: Iss. 8, Article 10.
Available at: https://dc-china-simulation.researchcommons.org/journal/vol28/iss8/10

First Page

1776

Revised Date

2015-04-12

DOI Link

https://doi.org/

Last Page

1782

CLC

TP241.2/278

Recommended Citation

Lu Rui, Li Linying. Research on Scheduling Problem of Single-arm Cluster Tools with Residency Time Constraints[J]. Journal of System Simulation, 2016, 28(8): 1776-1782.