Journal of System Simulation
Abstract
Abstract: Considering the scheduling model and schedulibility for single-arm cluster tools with wafer residency time constraints, a mixed- integer linear programming model with both single-arm and temporal constraints for processing module was constructed. The rationality of equivalent processing time for concurrency module was theoretically proved. Based on this, the periodic wafer processing and transportation procedure for both single-arm and processing module was analyzed. Meanwhile, the schedulibility conditions for cluster tools were proved. The simulation experiments were carried out to test the model and schedulable conditions, and the results reveal the validity and feasibility of the presented model.
Recommended Citation
Rui, Lu and Li, Linying
(2020)
"Research on Scheduling Problem of Single-arm Cluster Tools with Residency Time Constraints,"
Journal of System Simulation: Vol. 28:
Iss.
8, Article 10.
Available at:
https://dc-china-simulation.researchcommons.org/journal/vol28/iss8/10
First Page
1776
Revised Date
2015-04-12
DOI Link
https://doi.org/
Last Page
1782
CLC
TP241.2/278
Recommended Citation
Lu Rui, Li Linying. Research on Scheduling Problem of Single-arm Cluster Tools with Residency Time Constraints[J]. Journal of System Simulation, 2016, 28(8): 1776-1782.
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