Journal of System Simulation
Abstract
Abstract: For cluster tools with residency time constraints in semiconductor manufactory, online scheduling problem was studied when temporary wafers arrived with emergency order, rework and new product development, et al. Utilizing available resource interval, the two-layer online scheduling method was proposed without changing existing schedule. The outer layer algorithm used an improved quantum evolutionary algorithm to optimize processing order of temporary wafers. Based on the results, the inner layer algorithm gained feasible solutions from available space by backward stepwise recursive strategy, and determined start time of wafer in feasible solution space by means of reverted sequence maximum backtrack strategy. Simulation results and comparisons on benchmarks with different scales demonstrate the effectiveness of the presented method.
Recommended Citation
Li, Linying; Rui, Lu; Li, Shaohua; Yu, Jing; and Diao, Jianhua
(2020)
"Online Scheduling Method of Cluster Tools with Residency Time Constraint,"
Journal of System Simulation: Vol. 29:
Iss.
2, Article 14.
DOI: 10.16182/j.issn1004731x.joss.201702014
Available at:
https://dc-china-simulation.researchcommons.org/journal/vol29/iss2/14
First Page
337
Revised Date
2016-03-12
DOI Link
https://doi.org/10.16182/j.issn1004731x.joss.201702014
Last Page
345
CLC
TP241.2;TP278
Recommended Citation
Li Linying, Lu Rui, Li Shaohua, Jing Yu, Diao Jianhua. Online Scheduling Method of Cluster Tools with Residency Time Constraint[J]. Journal of System Simulation, 2017, 29(2): 337-345.
DOI
10.16182/j.issn1004731x.joss.201702014
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