Research on Adaptive Scheduling of Single-arm Cluster Tools for Throughput Ratio of Multiple Wafer Types with Concurrent Processing

Authors

Chunrong Pan, School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China
Yu Cui, School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China
Wenqing Xiong, School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China
Hao Zhou, School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China
Jiliang Luo, School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China; College of Computer Science and Technology, Huaqiao University, Xiamen 361021, China; Fujian Engineering Research Center of Motor Control and System Optimal Schedule, Xiamen 361021, China

Abstract

Abstract: Concurrent processing makes the wafer fabrication process prone to deadlocks and completion node ambiguity. A Petri net model is established to describe the system operation process by taking for the single-arm cluster tools for fully parallel processing of two wafer types as the research object, and a control strategy is developed to avoid the system deadlock. Based on the Petri net model, the temporal properties of the system is analyzed based on earliest starting strategy, and the action cycle sequence of robot is determined during the monitoring cycle for different scenarios of lot switching in a single production monitoring cycle. An adaptive scheduling algorithm is developed to obtain the production schedule, which can adaptively adjust the ratio of wafer output in each monitoring cycle by setting the type of wafers processed in the shared module, so that the desired production state is continuously approached by adjusting the ratio of wafer output in each monitoring cycle. The feasibility and effectiveness of the algorithm are verified by examples.

Recommended Citation

Pan, Chunrong; Cui, Yu; Xiong, Wenqing; Zhou, Hao; and Luo, Jiliang (2024) "Research on Adaptive Scheduling of Single-arm Cluster Tools for Throughput Ratio of Multiple Wafer Types with Concurrent Processing," Journal of System Simulation: Vol. 36: Iss. 12, Article 13.
DOI: 10.16182/j.issn1004731x.joss.23-128
Available at: https://dc-china-simulation.researchcommons.org/journal/vol36/iss12/13

First Page

2906

Last Page

2916

CLC

TP273.2

Recommended Citation

Pan Chunrong, Cui Yu, Xiong Wenqing, et al. Research on Adaptive Scheduling of Single-arm Cluster Tools for Throughput Ratio of Multiple Wafer Types with Concurrent Processing[J]. Journal of System Simulation, 2024, 36(12): 2906-2916.

DOI

10.16182/j.issn1004731x.joss.23-128